remark goes here MASS Si 0.000 0.000 ATTN, need revision BOND os-Si 0.00 0.000 ATTN, need revision Si-ha 0.00 0.000 ATTN, need revision Si-c3 0.00 0.000 ATTN, need revision ANGLE c3-os-Si 0.000 0.000 ATTN, need revision os-Si-ha 0.000 0.000 ATTN, need revision os-Si-c3 0.000 0.000 ATTN, need revision Si-c3-hc 0.000 0.000 ATTN, need revision Si-c3-c3 0.000 0.000 ATTN, need revision ha-Si-ha 0.000 0.000 ATTN, need revision ha-Si-c3 0.000 0.000 ATTN, need revision DIHE c3-os-Si-ha 1 0.000 0.000 0.000 ATTN, need revision c3-os-Si-c3 1 0.000 0.000 0.000 ATTN, need revision os-Si-c3-hc 1 0.000 0.000 0.000 ATTN, need revision os-Si-c3-c3 1 0.000 0.000 0.000 ATTN, need revision ha-Si-c3-hc 1 0.000 0.000 0.000 ATTN, need revision ha-Si-c3-c3 1 0.000 0.000 0.000 ATTN, need revision IMPROPER NONBON Si 0.0000 0.0000 ATTN, need revision